CMOS compatible piezoelectric energy harvesting at MEMS scale

This research explores the development of a new class of MEMS-scale piezoelectric energy harvesters that have the potential to be monolithically integrated with CMOS circuits. The devices use piezoelectric polymers and harvest energy from ambient vibrations. For nascent technologies like wearables, health monitoring, implantable medical devices (IMD), smart-home and surveillance sensors, these can be utilized to supply sustainable, clean power for standalone electronic sensor or transducer elements; effectively replacing batteries. The approach is expected to significantly enhance device lifetimes by generating microwatt range power levels. For more information, please visit:

Provided by University of Miami/Dr. Onur Tigli's BioCMOS/MEMS/NANO Research Team

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